Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness

Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro- Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by parametric resonance. Here, in order to also tra...

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Detalles Bibliográficos
Autores principales: Frangi, Attilio, Guerrieri, Andrea, Boni, Nicoló
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5422052/
https://www.ncbi.nlm.nih.gov/pubmed/28383483
http://dx.doi.org/10.3390/s17040779

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5422052/
https://www.ncbi.nlm.nih.gov/pubmed/28383483
http://dx.doi.org/10.3390/s17040779

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