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Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness
Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro- Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by parametric resonance. Here, in order to also tra...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5422052/ https://www.ncbi.nlm.nih.gov/pubmed/28383483 http://dx.doi.org/10.3390/s17040779 |