In situ MEMS testing: correlation of high-resolution X-ray diffraction with mechanical experiments and finite element analysis

New methods are needed in microsystems technology for evaluating microelectromechanical systems (MEMS) because of their reduced size. The assessment and characterization of mechanical and structural relations of MEMS are essential to assure the long-term functioning of devices, and have a significan...

Descripción completa

Detalles Bibliográficos
Autores principales: Schifferle, Andreas, Dommann, Alex, Neels, Antonia
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Taylor & Francis 2017
Materias:
Engineering and Structural Materials
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5425911/
https://www.ncbi.nlm.nih.gov/pubmed/28533825
http://dx.doi.org/10.1080/14686996.2017.1282800

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5425911/
https://www.ncbi.nlm.nih.gov/pubmed/28533825
http://dx.doi.org/10.1080/14686996.2017.1282800

Ejemplares similares