Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured Al electrodes

Shear mode solidly mounted resonators (SMRs) are fabricated using an inclined c-axis ZnO grown on a rough Al electrode. The roughness of the Al surface is controlled by changing the substrate temperature during the deposition process to promote the growth of inclined ZnO microcrystals. The optimum s...

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Detalles Bibliográficos
Autores principales: Rughoobur, Girish, DeMiguel-Ramos, Mario, Escolano, José-Miguel, Iborra, Enrique, Flewitt, Andrew John
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5431054/
https://www.ncbi.nlm.nih.gov/pubmed/28465522
http://dx.doi.org/10.1038/s41598-017-01545-2

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5431054/
https://www.ncbi.nlm.nih.gov/pubmed/28465522
http://dx.doi.org/10.1038/s41598-017-01545-2

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