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Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured Al electrodes
Shear mode solidly mounted resonators (SMRs) are fabricated using an inclined c-axis ZnO grown on a rough Al electrode. The roughness of the Al surface is controlled by changing the substrate temperature during the deposition process to promote the growth of inclined ZnO microcrystals. The optimum s...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5431054/ https://www.ncbi.nlm.nih.gov/pubmed/28465522 http://dx.doi.org/10.1038/s41598-017-01545-2 |