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Band Offset Measurements in Atomic-Layer-Deposited Al(2)O(3)/Zn(0.8)Al(0.2)O Heterojunction Studied by X-ray Photoelectron Spectroscopy
Pure aluminum oxide (Al(2)O(3)) and zinc aluminum oxide (Zn(x)Al(1-x)O) thin films were deposited by atomic layer deposition (ALD). The microstructure and optical band gaps (E (g)) of the Zn(x)Al(1-x)O (0.2 ≤ x ≤ 1) films were studied by X-ray diffractometer and Tauc method. The band offsets and ali...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5438334/ https://www.ncbi.nlm.nih.gov/pubmed/28532128 http://dx.doi.org/10.1186/s11671-017-2131-8 |