Ion-Induced Nanoscale Ripple Patterns on Si Surfaces: Theory and Experiment

Nanopatterning of solid surfaces by low-energy ion bombardment has received considerable interest in recent years. This interest was partially motivated by promising applications of nanopatterned substrates in the production of functional surfaces. Especially nanoscale ripple patterns on Si surfaces...

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Detalles Bibliográficos
Autores principales: Keller, Adrian, Facsko, Stefan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2010
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5445787/
https://www.ncbi.nlm.nih.gov/pubmed/28883355
http://dx.doi.org/10.3390/ma3104811

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5445787/
https://www.ncbi.nlm.nih.gov/pubmed/28883355
http://dx.doi.org/10.3390/ma3104811

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