Cargando…
Atomic layer etching of graphene through controlled ion beam for graphene-based electronics
The electronic and optical properties of graphene are greatly dependent on the the number of layers. For the precise control of the graphene layers, atomic layer etching (ALE), a cyclic etching method achieved through chemical adsorption and physical desorption, can be the most powerful technique du...
| Autores principales: | , , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2017
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5446397/ https://www.ncbi.nlm.nih.gov/pubmed/28550291 http://dx.doi.org/10.1038/s41598-017-02430-8 |