Electrical Properties of Thin-Film Capacitors Fabricated Using High Temperature Sputtered Modified Barium Titanate

Simple thin-film capacitor stacks were fabricated from sputter-deposited doped barium titanate dielectric films with sputtered Pt and/or Ni electrodes and characterized electrically. Here, we report small signal, low frequency capacitance and parallel resistance data measured as a function of applie...

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Detalles Bibliográficos
Autores principales: Reynolds, Glyn J., Kratzer, Martin, Dubs, Martin, Felzer, Heinz, Mamazza, Robert
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5448953/
https://www.ncbi.nlm.nih.gov/pubmed/28817001
http://dx.doi.org/10.3390/ma5040644

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5448953/
https://www.ncbi.nlm.nih.gov/pubmed/28817001
http://dx.doi.org/10.3390/ma5040644

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