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Electrical Properties of Thin-Film Capacitors Fabricated Using High Temperature Sputtered Modified Barium Titanate
Simple thin-film capacitor stacks were fabricated from sputter-deposited doped barium titanate dielectric films with sputtered Pt and/or Ni electrodes and characterized electrically. Here, we report small signal, low frequency capacitance and parallel resistance data measured as a function of applie...
Autores principales: | Reynolds, Glyn J., Kratzer, Martin, Dubs, Martin, Felzer, Heinz, Mamazza, Robert |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2012
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5448953/ https://www.ncbi.nlm.nih.gov/pubmed/28817001 http://dx.doi.org/10.3390/ma5040644 |
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