Combined magnetron sputtering and pulsed laser deposition of TiO(2) and BFCO thin films

We report the successful demonstration of a hybrid system that combines pulsed laser deposition (PLD) and magnetron sputtering (MS) to deposit high quality thin films. The PLD and MS simultaneously use the same target, leading to an enhanced deposition rate. The performance of this technique is demo...

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Detalles Bibliográficos
Autores principales: Benetti, D., Nouar, R., Nechache, R., Pepin, H., Sarkissian, A., Rosei, F., MacLeod, J. M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5451404/
https://www.ncbi.nlm.nih.gov/pubmed/28566679
http://dx.doi.org/10.1038/s41598-017-02284-0

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5451404/
https://www.ncbi.nlm.nih.gov/pubmed/28566679
http://dx.doi.org/10.1038/s41598-017-02284-0

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