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Combined magnetron sputtering and pulsed laser deposition of TiO(2) and BFCO thin films
We report the successful demonstration of a hybrid system that combines pulsed laser deposition (PLD) and magnetron sputtering (MS) to deposit high quality thin films. The PLD and MS simultaneously use the same target, leading to an enhanced deposition rate. The performance of this technique is demo...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5451404/ https://www.ncbi.nlm.nih.gov/pubmed/28566679 http://dx.doi.org/10.1038/s41598-017-02284-0 |
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author | Benetti, D. Nouar, R. Nechache, R. Pepin, H. Sarkissian, A. Rosei, F. MacLeod, J. M. |
author_facet | Benetti, D. Nouar, R. Nechache, R. Pepin, H. Sarkissian, A. Rosei, F. MacLeod, J. M. |
author_sort | Benetti, D. |
collection | PubMed |
description | We report the successful demonstration of a hybrid system that combines pulsed laser deposition (PLD) and magnetron sputtering (MS) to deposit high quality thin films. The PLD and MS simultaneously use the same target, leading to an enhanced deposition rate. The performance of this technique is demonstrated through the deposition of titanium dioxide and bismuth-based perovskite oxide Bi(2)FeCrO(6) (BFCO) thin films on Si(100) and LaAlO(3) (LAO) (100). These specific oxides were chosen due to their functionalities, such as multiferroic and photovoltaic properties (BFCO) and photocatalysis (TiO(2)). We compare films deposited by conventional PLD, MS and PLD combined with MS, and show that under all conditions the latter technique offers an increased deposition rate (+50%) and produces films denser (+20%) than those produced by MS or PLD alone, and without the large clusters found in the PLD-deposited films. Under optimized conditions, the hybrid technique produces films that are two times smoother than either technique alone. |
format | Online Article Text |
id | pubmed-5451404 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2017 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-54514042017-06-01 Combined magnetron sputtering and pulsed laser deposition of TiO(2) and BFCO thin films Benetti, D. Nouar, R. Nechache, R. Pepin, H. Sarkissian, A. Rosei, F. MacLeod, J. M. Sci Rep Article We report the successful demonstration of a hybrid system that combines pulsed laser deposition (PLD) and magnetron sputtering (MS) to deposit high quality thin films. The PLD and MS simultaneously use the same target, leading to an enhanced deposition rate. The performance of this technique is demonstrated through the deposition of titanium dioxide and bismuth-based perovskite oxide Bi(2)FeCrO(6) (BFCO) thin films on Si(100) and LaAlO(3) (LAO) (100). These specific oxides were chosen due to their functionalities, such as multiferroic and photovoltaic properties (BFCO) and photocatalysis (TiO(2)). We compare films deposited by conventional PLD, MS and PLD combined with MS, and show that under all conditions the latter technique offers an increased deposition rate (+50%) and produces films denser (+20%) than those produced by MS or PLD alone, and without the large clusters found in the PLD-deposited films. Under optimized conditions, the hybrid technique produces films that are two times smoother than either technique alone. Nature Publishing Group UK 2017-05-31 /pmc/articles/PMC5451404/ /pubmed/28566679 http://dx.doi.org/10.1038/s41598-017-02284-0 Text en © The Author(s) 2017 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. |
spellingShingle | Article Benetti, D. Nouar, R. Nechache, R. Pepin, H. Sarkissian, A. Rosei, F. MacLeod, J. M. Combined magnetron sputtering and pulsed laser deposition of TiO(2) and BFCO thin films |
title | Combined magnetron sputtering and pulsed laser deposition of TiO(2) and BFCO thin films |
title_full | Combined magnetron sputtering and pulsed laser deposition of TiO(2) and BFCO thin films |
title_fullStr | Combined magnetron sputtering and pulsed laser deposition of TiO(2) and BFCO thin films |
title_full_unstemmed | Combined magnetron sputtering and pulsed laser deposition of TiO(2) and BFCO thin films |
title_short | Combined magnetron sputtering and pulsed laser deposition of TiO(2) and BFCO thin films |
title_sort | combined magnetron sputtering and pulsed laser deposition of tio(2) and bfco thin films |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5451404/ https://www.ncbi.nlm.nih.gov/pubmed/28566679 http://dx.doi.org/10.1038/s41598-017-02284-0 |
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