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Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene–Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources

We report a new method for growing hexagonal columnar nanograin structured silicon carbide (SiC) thin films on silicon substrates by using graphene–graphitic carbon nanoflakes (GGNs) templates from solid carbon sources. The growth was carried out in a conventional low pressure chemical vapor deposit...

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Detalles Bibliográficos
Autores principales: Liu, Xingfang, Sun, Guosheng, Liu, Bin, Yan, Guoguo, Guan, Min, Zhang, Yang, Zhang, Feng, Chen, Yu, Dong, Lin, Zheng, Liu, Liu, Shengbei, Tian, Lixin, Wang, Lei, Zhao, Wanshun, Zeng, Yiping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2013
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5452306/
https://www.ncbi.nlm.nih.gov/pubmed/28809227
http://dx.doi.org/10.3390/ma6041543