Cargando…
Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene–Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources
We report a new method for growing hexagonal columnar nanograin structured silicon carbide (SiC) thin films on silicon substrates by using graphene–graphitic carbon nanoflakes (GGNs) templates from solid carbon sources. The growth was carried out in a conventional low pressure chemical vapor deposit...
| Autores principales: | , , , , , , , , , , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2013
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5452306/ https://www.ncbi.nlm.nih.gov/pubmed/28809227 http://dx.doi.org/10.3390/ma6041543 |
| _version_ | 1783240382722605056 |
|---|---|
| author | Liu, Xingfang Sun, Guosheng Liu, Bin Yan, Guoguo Guan, Min Zhang, Yang Zhang, Feng Chen, Yu Dong, Lin Zheng, Liu Liu, Shengbei Tian, Lixin Wang, Lei Zhao, Wanshun Zeng, Yiping |
| author_facet | Liu, Xingfang Sun, Guosheng Liu, Bin Yan, Guoguo Guan, Min Zhang, Yang Zhang, Feng Chen, Yu Dong, Lin Zheng, Liu Liu, Shengbei Tian, Lixin Wang, Lei Zhao, Wanshun Zeng, Yiping |
| author_sort | Liu, Xingfang |
| collection | PubMed |
| description | We report a new method for growing hexagonal columnar nanograin structured silicon carbide (SiC) thin films on silicon substrates by using graphene–graphitic carbon nanoflakes (GGNs) templates from solid carbon sources. The growth was carried out in a conventional low pressure chemical vapor deposition system (LPCVD). The GGNs are small plates with lateral sizes of around 100 nm and overlap each other, and are made up of nanosized multilayer graphene and graphitic carbon matrix (GCM). Long and straight SiC nanograins with hexagonal shapes, and with lateral sizes of around 200–400 nm are synthesized on the GGNs, which form compact SiC thin films. |
| format | Online Article Text |
| id | pubmed-5452306 |
| institution | National Center for Biotechnology Information |
| language | English |
| publishDate | 2013 |
| publisher | MDPI |
| record_format | MEDLINE/PubMed |
| spelling | pubmed-54523062017-07-28 Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene–Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources Liu, Xingfang Sun, Guosheng Liu, Bin Yan, Guoguo Guan, Min Zhang, Yang Zhang, Feng Chen, Yu Dong, Lin Zheng, Liu Liu, Shengbei Tian, Lixin Wang, Lei Zhao, Wanshun Zeng, Yiping Materials (Basel) Article We report a new method for growing hexagonal columnar nanograin structured silicon carbide (SiC) thin films on silicon substrates by using graphene–graphitic carbon nanoflakes (GGNs) templates from solid carbon sources. The growth was carried out in a conventional low pressure chemical vapor deposition system (LPCVD). The GGNs are small plates with lateral sizes of around 100 nm and overlap each other, and are made up of nanosized multilayer graphene and graphitic carbon matrix (GCM). Long and straight SiC nanograins with hexagonal shapes, and with lateral sizes of around 200–400 nm are synthesized on the GGNs, which form compact SiC thin films. MDPI 2013-04-16 /pmc/articles/PMC5452306/ /pubmed/28809227 http://dx.doi.org/10.3390/ma6041543 Text en © 2013 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/). |
| spellingShingle | Article Liu, Xingfang Sun, Guosheng Liu, Bin Yan, Guoguo Guan, Min Zhang, Yang Zhang, Feng Chen, Yu Dong, Lin Zheng, Liu Liu, Shengbei Tian, Lixin Wang, Lei Zhao, Wanshun Zeng, Yiping Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene–Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources |
| title | Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene–Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources |
| title_full | Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene–Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources |
| title_fullStr | Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene–Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources |
| title_full_unstemmed | Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene–Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources |
| title_short | Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene–Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources |
| title_sort | growth of hexagonal columnar nanograin structured sic thin films on silicon substrates with graphene–graphitic carbon nanoflakes templates from solid carbon sources |
| topic | Article |
| url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5452306/ https://www.ncbi.nlm.nih.gov/pubmed/28809227 http://dx.doi.org/10.3390/ma6041543 |
| work_keys_str_mv | AT liuxingfang growthofhexagonalcolumnarnanograinstructuredsicthinfilmsonsiliconsubstrateswithgraphenegraphiticcarbonnanoflakestemplatesfromsolidcarbonsources AT sunguosheng growthofhexagonalcolumnarnanograinstructuredsicthinfilmsonsiliconsubstrateswithgraphenegraphiticcarbonnanoflakestemplatesfromsolidcarbonsources AT liubin growthofhexagonalcolumnarnanograinstructuredsicthinfilmsonsiliconsubstrateswithgraphenegraphiticcarbonnanoflakestemplatesfromsolidcarbonsources AT yanguoguo growthofhexagonalcolumnarnanograinstructuredsicthinfilmsonsiliconsubstrateswithgraphenegraphiticcarbonnanoflakestemplatesfromsolidcarbonsources AT guanmin growthofhexagonalcolumnarnanograinstructuredsicthinfilmsonsiliconsubstrateswithgraphenegraphiticcarbonnanoflakestemplatesfromsolidcarbonsources AT zhangyang growthofhexagonalcolumnarnanograinstructuredsicthinfilmsonsiliconsubstrateswithgraphenegraphiticcarbonnanoflakestemplatesfromsolidcarbonsources AT zhangfeng growthofhexagonalcolumnarnanograinstructuredsicthinfilmsonsiliconsubstrateswithgraphenegraphiticcarbonnanoflakestemplatesfromsolidcarbonsources AT chenyu growthofhexagonalcolumnarnanograinstructuredsicthinfilmsonsiliconsubstrateswithgraphenegraphiticcarbonnanoflakestemplatesfromsolidcarbonsources AT donglin growthofhexagonalcolumnarnanograinstructuredsicthinfilmsonsiliconsubstrateswithgraphenegraphiticcarbonnanoflakestemplatesfromsolidcarbonsources AT zhengliu growthofhexagonalcolumnarnanograinstructuredsicthinfilmsonsiliconsubstrateswithgraphenegraphiticcarbonnanoflakestemplatesfromsolidcarbonsources AT liushengbei growthofhexagonalcolumnarnanograinstructuredsicthinfilmsonsiliconsubstrateswithgraphenegraphiticcarbonnanoflakestemplatesfromsolidcarbonsources AT tianlixin growthofhexagonalcolumnarnanograinstructuredsicthinfilmsonsiliconsubstrateswithgraphenegraphiticcarbonnanoflakestemplatesfromsolidcarbonsources AT wanglei growthofhexagonalcolumnarnanograinstructuredsicthinfilmsonsiliconsubstrateswithgraphenegraphiticcarbonnanoflakestemplatesfromsolidcarbonsources AT zhaowanshun growthofhexagonalcolumnarnanograinstructuredsicthinfilmsonsiliconsubstrateswithgraphenegraphiticcarbonnanoflakestemplatesfromsolidcarbonsources AT zengyiping growthofhexagonalcolumnarnanograinstructuredsicthinfilmsonsiliconsubstrateswithgraphenegraphiticcarbonnanoflakestemplatesfromsolidcarbonsources |