Dislocation Energetics and Pop-Ins in AlN Thin Films by Berkovich Nanoindentation

Nanoindentation-induced multiple pop-ins were observed in the load-displacement curves when the mechanical responses of AlN films grown on c-plane sapphire substrates were investigated by using Berkovich indenters. No evidence of phase transformation is revealed by cross-sectional transmission elect...

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Detalles Bibliográficos
Autores principales: Jian, Sheng-Rui, Tseng, Yu-Chin, Teng, I-Ju, Juang, Jenh-Yih
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5452654/
https://www.ncbi.nlm.nih.gov/pubmed/28788330
http://dx.doi.org/10.3390/ma6094259

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5452654/
https://www.ncbi.nlm.nih.gov/pubmed/28788330
http://dx.doi.org/10.3390/ma6094259

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