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Dislocation Energetics and Pop-Ins in AlN Thin Films by Berkovich Nanoindentation
Nanoindentation-induced multiple pop-ins were observed in the load-displacement curves when the mechanical responses of AlN films grown on c-plane sapphire substrates were investigated by using Berkovich indenters. No evidence of phase transformation is revealed by cross-sectional transmission elect...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5452654/ https://www.ncbi.nlm.nih.gov/pubmed/28788330 http://dx.doi.org/10.3390/ma6094259 |