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Rapid Growth of Nanostructured Diamond Film on Silicon and Ti–6Al–4V Alloy Substrates
Nanostructured diamond (NSD) films were grown on silicon and Ti–6Al–4V alloy substrates by microwave plasma chemical vapor deposition (MPCVD). NSD Growth rates of 5 μm/h on silicon, and 4 μm/h on Ti–6Al–4V were achieved. In a chemistry of H(2)/CH(4)/N(2), varying ratios of CH(4)/H(2) and N(2)/CH(4)...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2014
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5453140/ https://www.ncbi.nlm.nih.gov/pubmed/28788461 http://dx.doi.org/10.3390/ma7010365 |
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author | Samudrala, Gopi K. Vohra, Yogesh K. Walock, Michael J. Miles, Robin |
author_facet | Samudrala, Gopi K. Vohra, Yogesh K. Walock, Michael J. Miles, Robin |
author_sort | Samudrala, Gopi K. |
collection | PubMed |
description | Nanostructured diamond (NSD) films were grown on silicon and Ti–6Al–4V alloy substrates by microwave plasma chemical vapor deposition (MPCVD). NSD Growth rates of 5 μm/h on silicon, and 4 μm/h on Ti–6Al–4V were achieved. In a chemistry of H(2)/CH(4)/N(2), varying ratios of CH(4)/H(2) and N(2)/CH(4) were employed in this research and their effect on the resulting diamond films were studied by X-ray photoelectron spectroscopy, Raman spectroscopy, scanning electron microscopy, and atomic force microscopy. As a result of modifying the stock cooling stage of CVD system, we were able to utilize plasma with high power densities in our NSD growth experiments, enabling us to achieve high growth rates. Substrate temperature and N(2)/CH(4) ratio have been found to be key factors in determining the diamond film quality. NSD films grown as part of this study were shown to contain 85% to 90% sp(3) bonded carbon. |
format | Online Article Text |
id | pubmed-5453140 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2014 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-54531402017-07-28 Rapid Growth of Nanostructured Diamond Film on Silicon and Ti–6Al–4V Alloy Substrates Samudrala, Gopi K. Vohra, Yogesh K. Walock, Michael J. Miles, Robin Materials (Basel) Article Nanostructured diamond (NSD) films were grown on silicon and Ti–6Al–4V alloy substrates by microwave plasma chemical vapor deposition (MPCVD). NSD Growth rates of 5 μm/h on silicon, and 4 μm/h on Ti–6Al–4V were achieved. In a chemistry of H(2)/CH(4)/N(2), varying ratios of CH(4)/H(2) and N(2)/CH(4) were employed in this research and their effect on the resulting diamond films were studied by X-ray photoelectron spectroscopy, Raman spectroscopy, scanning electron microscopy, and atomic force microscopy. As a result of modifying the stock cooling stage of CVD system, we were able to utilize plasma with high power densities in our NSD growth experiments, enabling us to achieve high growth rates. Substrate temperature and N(2)/CH(4) ratio have been found to be key factors in determining the diamond film quality. NSD films grown as part of this study were shown to contain 85% to 90% sp(3) bonded carbon. MDPI 2014-01-13 /pmc/articles/PMC5453140/ /pubmed/28788461 http://dx.doi.org/10.3390/ma7010365 Text en © 2014 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/). |
spellingShingle | Article Samudrala, Gopi K. Vohra, Yogesh K. Walock, Michael J. Miles, Robin Rapid Growth of Nanostructured Diamond Film on Silicon and Ti–6Al–4V Alloy Substrates |
title | Rapid Growth of Nanostructured Diamond Film on Silicon and Ti–6Al–4V Alloy Substrates |
title_full | Rapid Growth of Nanostructured Diamond Film on Silicon and Ti–6Al–4V Alloy Substrates |
title_fullStr | Rapid Growth of Nanostructured Diamond Film on Silicon and Ti–6Al–4V Alloy Substrates |
title_full_unstemmed | Rapid Growth of Nanostructured Diamond Film on Silicon and Ti–6Al–4V Alloy Substrates |
title_short | Rapid Growth of Nanostructured Diamond Film on Silicon and Ti–6Al–4V Alloy Substrates |
title_sort | rapid growth of nanostructured diamond film on silicon and ti–6al–4v alloy substrates |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5453140/ https://www.ncbi.nlm.nih.gov/pubmed/28788461 http://dx.doi.org/10.3390/ma7010365 |
work_keys_str_mv | AT samudralagopik rapidgrowthofnanostructureddiamondfilmonsiliconandti6al4valloysubstrates AT vohrayogeshk rapidgrowthofnanostructureddiamondfilmonsiliconandti6al4valloysubstrates AT walockmichaelj rapidgrowthofnanostructureddiamondfilmonsiliconandti6al4valloysubstrates AT milesrobin rapidgrowthofnanostructureddiamondfilmonsiliconandti6al4valloysubstrates |