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The Effects of Zr Doping on the Optical, Electrical and Microstructural Properties of Thin ZnO Films Deposited by Atomic Layer Deposition

Transparent conducting oxides (TCOs), with high optical transparency (≥85%) and low electrical resistivity (10(−4) Ω·cm) are used in a wide variety of commercial devices. There is growing interest in replacing conventional TCOs such as indium tin oxide with lower cost, earth abundant materials. In t...

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Detalles Bibliográficos
Autores principales: Herodotou, Stephania, Treharne, Robert E., Durose, Ken, Tatlock, Gordon J., Potter, Richard J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5455359/
https://www.ncbi.nlm.nih.gov/pubmed/28793633
http://dx.doi.org/10.3390/ma8105369