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The Effects of Zr Doping on the Optical, Electrical and Microstructural Properties of Thin ZnO Films Deposited by Atomic Layer Deposition
Transparent conducting oxides (TCOs), with high optical transparency (≥85%) and low electrical resistivity (10(−4) Ω·cm) are used in a wide variety of commercial devices. There is growing interest in replacing conventional TCOs such as indium tin oxide with lower cost, earth abundant materials. In t...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5455359/ https://www.ncbi.nlm.nih.gov/pubmed/28793633 http://dx.doi.org/10.3390/ma8105369 |