Effect of Annealing Process on the Properties of Ni(55%)Cr(40%)Si(5%) Thin-Film Resistors

Resistors in integrated circuits (ICs) are implemented using diffused methods fabricated in the base and emitter regions of bipolar transistor or in source/drain regions of CMOS. Deposition of thin films on the wafer surface is another choice to fabricate the thin-film resistors in ICs’ applications...

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Detalles Bibliográficos
Autores principales: Cheng, Huan-Yi, Chen, Ying-Chung, Li, Pei-Jou, Yang, Cheng-Fu, Huang, Hong-Hsin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5455380/
https://www.ncbi.nlm.nih.gov/pubmed/28793598
http://dx.doi.org/10.3390/ma8105338

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5455380/
https://www.ncbi.nlm.nih.gov/pubmed/28793598
http://dx.doi.org/10.3390/ma8105338

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