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Effect of Annealing Process on the Properties of Ni(55%)Cr(40%)Si(5%) Thin-Film Resistors
Resistors in integrated circuits (ICs) are implemented using diffused methods fabricated in the base and emitter regions of bipolar transistor or in source/drain regions of CMOS. Deposition of thin films on the wafer surface is another choice to fabricate the thin-film resistors in ICs’ applications...
Autores principales: | Cheng, Huan-Yi, Chen, Ying-Chung, Li, Pei-Jou, Yang, Cheng-Fu, Huang, Hong-Hsin |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5455380/ https://www.ncbi.nlm.nih.gov/pubmed/28793598 http://dx.doi.org/10.3390/ma8105338 |
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