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Effect of Annealing Temperature and Oxygen Flow in the Properties of Ion Beam Sputtered SnO(2−x) Thin Films
Tin oxide (SnO(2−x)) thin films were prepared under various flow ratios of O(2)/(O(2) + Ar) on unheated glass substrate using the ion beam sputtering (IBS) deposition technique. This work studied the effects of the flow ratio of O(2)/(O(2) + Ar), chamber pressures and post-annealing treatment on the...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2015
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5455525/ https://www.ncbi.nlm.nih.gov/pubmed/28793504 http://dx.doi.org/10.3390/ma8085243 |