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Investigation of the High Mobility IGZO Thin Films by Using Co-Sputtering Method
High transmittance ratio in visible range, low resistivity, and high mobility of IGZO thin films were prepared at room temperature for 30 min by co-sputtering of Zn(2)Ga(2)O(5) (Ga(2)O(3) + 2 ZnO, GZO) ceramic and In(2)O(3) ceramic at the same time. The deposition power of pure In(2)O(3) ceramic tar...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2015
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5455548/ http://dx.doi.org/10.3390/ma8052769 |