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The pH Sensing Properties of RF Sputtered RuO(2) Thin-Film Prepared Using Different Ar/O(2) Flow Ratio
The influence of the Ar/O(2) gas ratio during radio frequency (RF) sputtering of the RuO(2) sensing electrode on the pH sensing performance is investigated. The developed pH sensor consists in an RF sputtered ruthenium oxide thin-film sensing electrode, in conjunction with an electroplated Ag/AgCl r...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2015
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5455725/ http://dx.doi.org/10.3390/ma8063352 |