Batch Fabrication of Broadband Metallic Planar Microlenses and Their Arrays Combining Nanosphere Self-Assembly with Conventional Photolithography

A novel low-cost, batch-fabrication method combining the spin-coating nanosphere lithography (NSL) with the conventional photolithographic technique is demonstrated to efficiently produce the metallic planar microlenses and their arrays. The developed microlenses are composed of subwavelength nanoho...

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Detalles Bibliográficos
Autores principales: Wang, Ping, Yu, Xiaochang, Zhu, Yechuan, Yu, Yiting, Yuan, Weizheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2017
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5457382/
https://www.ncbi.nlm.nih.gov/pubmed/28582969
http://dx.doi.org/10.1186/s11671-017-2158-x

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5457382/
https://www.ncbi.nlm.nih.gov/pubmed/28582969
http://dx.doi.org/10.1186/s11671-017-2158-x

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