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Batch Fabrication of Broadband Metallic Planar Microlenses and Their Arrays Combining Nanosphere Self-Assembly with Conventional Photolithography
A novel low-cost, batch-fabrication method combining the spin-coating nanosphere lithography (NSL) with the conventional photolithographic technique is demonstrated to efficiently produce the metallic planar microlenses and their arrays. The developed microlenses are composed of subwavelength nanoho...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5457382/ https://www.ncbi.nlm.nih.gov/pubmed/28582969 http://dx.doi.org/10.1186/s11671-017-2158-x |