Fabrication of Solid State Nanopore in Thin Silicon Membrane Using Low Cost Multistep Chemical Etching

Nanopore-based analysis is currently an area of great interest in many disciplines with the potential for exceptionally versatile applications in medicine. This work presents a novel step towards fabrication of a single solid-state nanopore (SSSN) in a thin silicon membrane. Silicon nanopores are re...

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Detalles Bibliográficos
Autores principales: Khan, Muhammad Shuja, Williams, John Dalton
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5458877/
https://www.ncbi.nlm.nih.gov/pubmed/28793644
http://dx.doi.org/10.3390/ma8115390

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5458877/
https://www.ncbi.nlm.nih.gov/pubmed/28793644
http://dx.doi.org/10.3390/ma8115390

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