Direct Wafer Bonding and Its Application to Waveguide Optical Isolators

This paper reviews the direct bonding technique focusing on the waveguide optical isolator application. A surface activated direct bonding technique is a powerful tool to realize a tight contact between dissimilar materials. This technique has the potential advantage that dissimilar materials are bo...

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Detalles Bibliográficos
Autores principales: Mizumoto, Tetsuya, Shoji, Yuya, Takei, Ryohei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2012
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5458974/
https://www.ncbi.nlm.nih.gov/pubmed/28817020
http://dx.doi.org/10.3390/ma5050985

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5458974/
https://www.ncbi.nlm.nih.gov/pubmed/28817020
http://dx.doi.org/10.3390/ma5050985

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