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Direct Wafer Bonding and Its Application to Waveguide Optical Isolators
This paper reviews the direct bonding technique focusing on the waveguide optical isolator application. A surface activated direct bonding technique is a powerful tool to realize a tight contact between dissimilar materials. This technique has the potential advantage that dissimilar materials are bo...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2012
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5458974/ https://www.ncbi.nlm.nih.gov/pubmed/28817020 http://dx.doi.org/10.3390/ma5050985 |