Vibration-Assisted Femtosecond Laser Drilling with Controllable Taper Angles for AMOLED Fine Metal Mask Fabrication

This study investigates the effect of focal plane variation using vibration in a femtosecond laser hole drilling process on Invar alloy fabrication quality for the production of fine metal masks (FMMs). FMMs are used in the red, green, blue (RGB) evaporation process in Active Matrix Organic Light-Em...

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Detalles Bibliográficos
Autores principales: Choi, Wonsuk, Kim, Hoon Young, Jeon, Jin Woo, Chang, Won Seok, Cho, Sung-Hak
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5459095/
https://www.ncbi.nlm.nih.gov/pubmed/28772571
http://dx.doi.org/10.3390/ma10020212

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5459095/
https://www.ncbi.nlm.nih.gov/pubmed/28772571
http://dx.doi.org/10.3390/ma10020212

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