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Infrared Reflectance Analysis of Epitaxial n-Type Doped GaN Layers Grown on Sapphire
Infrared (IR) reflectance spectroscopy is applied to study Si-doped multilayer n(+)/n(0)/n(+)-GaN structure grown on GaN buffer with GaN-template/sapphire substrate. Analysis of the investigated structure by photo-etching, SEM, and SIMS methods showed the existence of the additional layer with the d...
Autores principales: | , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5465006/ https://www.ncbi.nlm.nih.gov/pubmed/28599511 http://dx.doi.org/10.1186/s11671-017-2171-0 |