Polymeric lithography editor: Editing lithographic errors with nanoporous polymeric probes

A new lithographic editing system with an ability to erase and rectify errors in microscale with real-time optical feedback is demonstrated. The erasing probe is a conically shaped hydrogel (tip size, ca. 500 nm) template-synthesized from track-etched conical glass wafers. The “nanosponge” hydrogel...

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Detalles Bibliográficos
Autores principales: Rajasekaran, Pradeep Ramiah, Zhou, Chuanhong, Dasari, Mallika, Voss, Kay-Obbe, Trautmann, Christina, Kohli, Punit
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Association for the Advancement of Science 2017
Materias:
Research Articles
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5466373/
https://www.ncbi.nlm.nih.gov/pubmed/28630898
http://dx.doi.org/10.1126/sciadv.1602071

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5466373/
https://www.ncbi.nlm.nih.gov/pubmed/28630898
http://dx.doi.org/10.1126/sciadv.1602071

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