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Sliding Speed-Dependent Tribochemical Wear of Oxide-Free Silicon

Fundamental understanding of tribochemical wear mechanism of oxide-free single crystalline silicon (without native oxide layer) is essential to optimize the process of ultra-precision surface manufacturing. Here, we report sliding speed-dependent nanowear of oxide-free silicon against SiO(2) microsp...

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Detalles Bibliográficos
Autores principales: Chen, Lei, Qi, Yaqiong, Yu, Bingjun, Qian, Linmao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5468177/
https://www.ncbi.nlm.nih.gov/pubmed/28610397
http://dx.doi.org/10.1186/s11671-017-2176-8