Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator

We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experim...

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Detalles Bibliográficos
Autores principales: Al-Ghamdi, Majed S., Alneamy, Ayman M., Park, Sangtak, Li, Beichen, Khater, Mahmoud E., Abdel-Rahman, Eihab M., Heppler, Glenn R., Yavuz, Mustafa
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5470797/
https://www.ncbi.nlm.nih.gov/pubmed/28505097
http://dx.doi.org/10.3390/s17051121

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5470797/
https://www.ncbi.nlm.nih.gov/pubmed/28505097
http://dx.doi.org/10.3390/s17051121

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