Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator

We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experim...

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Autores principales: Al-Ghamdi, Majed S., Alneamy, Ayman M., Park, Sangtak, Li, Beichen, Khater, Mahmoud E., Abdel-Rahman, Eihab M., Heppler, Glenn R., Yavuz, Mustafa
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5470797/
https://www.ncbi.nlm.nih.gov/pubmed/28505097
http://dx.doi.org/10.3390/s17051121
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author Al-Ghamdi, Majed S.
Alneamy, Ayman M.
Park, Sangtak
Li, Beichen
Khater, Mahmoud E.
Abdel-Rahman, Eihab M.
Heppler, Glenn R.
Yavuz, Mustafa
author_facet Al-Ghamdi, Majed S.
Alneamy, Ayman M.
Park, Sangtak
Li, Beichen
Khater, Mahmoud E.
Abdel-Rahman, Eihab M.
Heppler, Glenn R.
Yavuz, Mustafa
author_sort Al-Ghamdi, Majed S.
collection PubMed
description We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was measured optically using a laser vibrometer. The predictions of the identified model were found to be in close agreement with the experimental results. We also identified the noise spectral density of process (actuation voltage) and measurement noise.
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spelling pubmed-54707972017-06-16 Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator Al-Ghamdi, Majed S. Alneamy, Ayman M. Park, Sangtak Li, Beichen Khater, Mahmoud E. Abdel-Rahman, Eihab M. Heppler, Glenn R. Yavuz, Mustafa Sensors (Basel) Article We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was measured optically using a laser vibrometer. The predictions of the identified model were found to be in close agreement with the experimental results. We also identified the noise spectral density of process (actuation voltage) and measurement noise. MDPI 2017-05-13 /pmc/articles/PMC5470797/ /pubmed/28505097 http://dx.doi.org/10.3390/s17051121 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Al-Ghamdi, Majed S.
Alneamy, Ayman M.
Park, Sangtak
Li, Beichen
Khater, Mahmoud E.
Abdel-Rahman, Eihab M.
Heppler, Glenn R.
Yavuz, Mustafa
Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator
title Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator
title_full Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator
title_fullStr Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator
title_full_unstemmed Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator
title_short Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator
title_sort nonlinear parameter identification of a resonant electrostatic mems actuator
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5470797/
https://www.ncbi.nlm.nih.gov/pubmed/28505097
http://dx.doi.org/10.3390/s17051121
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