Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors

The development of the optical bio-chemical sensing technology is an extremely important scientific and technological issue for diagnosis and monitoring of diseases, control of industrial processes, environmental detection of air and water pollutants. Owing to their distinctive features, chalcogenid...

Descripción completa

Detalles Bibliográficos
Autores principales: Baudet, E., Sergent, M., Němec, P., Cardinaud, C., Rinnert, E., Michel, K., Jouany, L., Bureau, B., Nazabal, V.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5471270/
https://www.ncbi.nlm.nih.gov/pubmed/28615650
http://dx.doi.org/10.1038/s41598-017-03678-w

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5471270/
https://www.ncbi.nlm.nih.gov/pubmed/28615650
http://dx.doi.org/10.1038/s41598-017-03678-w

Ejemplares similares