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Atomic rearrangement of a sputtered MoS(2) film from amorphous to a 2D layered structure by electron beam irradiation
We synthesised a crystalline MoS(2) film from as-sputtered amorphous film by applying an electron beam irradiation (EBI) process. A collimated electron beam (60 mm dia.) with an energy of 1 kV was irradiated for only 1 min to achieve crystallisation without an additional heating process. After the E...
Autores principales: | Kim, Bong Ho, Gu, Hyun Ho, Yoon, Young Joon |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5478615/ https://www.ncbi.nlm.nih.gov/pubmed/28634333 http://dx.doi.org/10.1038/s41598-017-04222-6 |
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