Cargando…

Vertical and bevel-structured SiC etching techniques incorporating different gas mixture plasmas for various microelectronic applications

This study presents a detailed fabrication method, together with validation, discussion, and analysis, for state-of-the-art silicon carbide (SiC) etching of vertical and bevelled structures by using inductively coupled plasma reactive ion etching (ICP-RIE) for microelectronic applications. Applying...

Descripción completa

Detalles Bibliográficos
Autores principales:	Sung, Ho-Kun, Qiang, Tian, Yao, Zhao, Li, Yang, Wu, Qun, Lee, Hee-Kwan, Park, Bum-Doo, Lim, Woong-Sun, Park, Kyung-Ho, Wang, Cong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5478634/ https://www.ncbi.nlm.nih.gov/pubmed/28634385 http://dx.doi.org/10.1038/s41598-017-04389-y

Ejemplares similares

Novel Method for Electroless Etching of 6H–SiC
por: Károlyházy, Gyula, et al.
Publicado: (2020)

Micropipes in SiC Single Crystal Observed by Molten KOH Etching
por: Wang, Hejing, et al.
Publicado: (2021)

On Relationships between Gas-Phase Chemistry and Reactive Ion Etching Kinetics for Silicon-Based Thin Films (SiC, SiO(2) and Si(x)N(y)) in Multi-Component Fluorocarbon Gas Mixtures
por: Efremov, Alexander, et al.
Publicado: (2021)

Vertical GaN and SiC power devices
por: Mochizuki, Kazuhiro
Publicado: (2018)

Fabrication of uniform 4H-SiC mesopores by pulsed electrochemical etching
por: Tan, Jia-Hui, et al.
Publicado: (2014)

Systematic Characterization of Plasma-Etched Trenches on 4H-SiC Wafers
por: Pirnaci, Massimo D., et al.
Publicado: (2021)

Synthesis of Vertically Standing MoS(2) Triangles on SiC
por: Lan, Feifei, et al.
Publicado: (2016)

Mechanism Analysis of Nanosecond Pulse Laser Etching of SiC(p)/Mg Composites
por: Wu, Zhe, et al.
Publicado: (2022)

Outcome of Beveled versus Vertical IncisionTechnique after Reconstructive or Aesthetic Facial Surgery
por: Feinendegen, Dominik L., et al.
Publicado: (2019)

Controllable growth of vertically aligned graphene on C-face SiC
por: Liu, Yu, et al.
Publicado: (2016)

Stable Field Emission from Vertically Oriented SiC Nanoarrays
por: Xiao, Jianfeng, et al.
Publicado: (2021)

High-temperature etching of SiC in SF(6)/O(2) inductively coupled plasma
por: Osipov, Artem A., et al.
Publicado: (2020)

Dataset on fractographic analysis of various SiC-based fibers
por: Mazerat, S., et al.
Publicado: (2020)

Vertically Conductive Single-Crystal SiC-Based Bragg Reflector Grown on Si Wafer
por: Massoubre, David, et al.
Publicado: (2015)

Large-Scale Monolithic Fabrication of III–V Vertical Nanowires on a Standard Si(100) Microelectronic Substrate
por: Lecestre, Aurélie, et al.
Publicado: (2022)

Bevel gear: fundamentals and applications
por: Klingelnberg, Jan
Publicado: (2016)

αSiC - βSiC - graphene composites
por: Razmjoo, Ali, et al.
Publicado: (2023)

Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers
por: Hochreiter, André, et al.
Publicado: (2023)

All epidural needle bevels are not the same
por: Benhardt, Amber C., et al.
Publicado: (2021)

Comparative Study on Micro-Grinding Performance of 2.5D C(f)/SiCs, 2.5D SiC(f)/SiCs, and SiC Ceramics
por: Wen, Quan, et al.
Publicado: (2023)

Comparison of Cyclic Hysteresis Behavior between Cross-Ply C/SiC and SiC/SiC Ceramic-Matrix Composites
por: Li, Longbiao
Publicado: (2016)

Analysis of SiC/Si Heterojunction Band Energy and Interface State Characteristics for SiC/Si VDMOS
por: Yang, Xin, et al.
Publicado: (2023)

Microelectronics
por: Alley, Charles L.
Publicado: (1986)

Microelectronics
por: Beale, J R A
Publicado: (1971)

Microelectronics
por: Whitaker, Jerry C
Publicado: (2006)

Microelectronics /
por: Millman, Jacob, 1911-1991
Publicado: (1987)

Influence of Oxidation Damages on Mechanical Properties of SiC/SiC Composite Using Domestic Hi-Nicalon Type SiC Fibers
por: Jin, Enze, et al.
Publicado: (2020)

Interfacial properties of SiC(f)/SiC minicomposites with a scheelite coating
por: Ni, Na, et al.
Publicado: (2022)

Spinal anesthesia and direction of spinal needle bevel
por: Prakash, Smita, et al.
Publicado: (2016)

Impact of Polymer-Assisted Epitaxial Graphene Growth on Various Types of SiC Substrates
por: Chatterjee, Atasi, et al.
Publicado: (2022)

Significant Improvement of Mechanical Properties of SiC-Nanowire-Reinforced SiC(f)/SiC Composites via Atomic Deposition of Ni Catalysts
por: Wu, Zongxu, et al.
Publicado: (2022)

Microstructural and nanoindentation study of TaN incorporated ZrB(2) and ZrB(2)–SiC ceramics
por: Delbari, Seyed Ali, et al.
Publicado: (2022)

A new model for in situ nitrogen incorporation into 4H-SiC during epitaxy
por: Ferro, Gabriel, et al.
Publicado: (2017)

Synthesis Metakaolin-Based Geopolymer Incorporated with SiC Sludge Using Design of Experiment Method
por: Lo, Kang-Wei, et al.
Publicado: (2022)

SiC/MoSi(2)-SiC-Si Oxidation Protective Coatings for HTR Graphite Spheres with Residual Si Optimized
por: Wei, Xiaoyu, et al.
Publicado: (2022)

SiC materials and devices
por: Willardson, R K, et al.
Publicado: (1998)

Preparation and Characterization of Pure SiC Ceramics by HTPVT Induced by Seeding with SiC Nanoarrays
por: Deng, Yu-Chen, et al.
Publicado: (2021)

Microstructural Analysis of Novel Preceramic Paper-Derived SiC(f)/SiC Composites
por: Li, Ke, et al.
Publicado: (2021)

Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor
por: Tian, Baohua, et al.
Publicado: (2021)

Limitations during Vapor Phase Growth of Bulk (100) 3C-SiC Using 3C-SiC-on-SiC Seeding Stacks
por: Schuh, Philipp, et al.
Publicado: (2019)

Cannot write session to /tmp/vufind_sessions/sess_fimvfa9tmd2v4nieb0socq668c