Data set for fabrication of conformal two-dimensional TiO(2) by atomic layer deposition using tetrakis (dimethylamino) titanium (TDMAT) and H(2)O precursors

The data and complementary information presented hare are related to the research article of “http://dx.doi.org/10.1016/j.matdes.2017.02.016; Materials and Design 120 (2017) 99–108” [1]. The article provides data and information on the case of atomic layer deposition (ALD) of ultra-thin two-dimensio...

Descripción completa

Detalles Bibliográficos
Autores principales: Zhuiykov, Serge, Akbari, Mohammad Karbalaei, Hai, Zhenyin, Xue, Chenyang, Xu, Hongyan, Hyde, Lachlan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2017
Materias:
Data Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5480828/
https://www.ncbi.nlm.nih.gov/pubmed/28664177
http://dx.doi.org/10.1016/j.dib.2017.06.013

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5480828/
https://www.ncbi.nlm.nih.gov/pubmed/28664177
http://dx.doi.org/10.1016/j.dib.2017.06.013

Ejemplares similares