Nanotwinned metal MEMS films with unprecedented strength and stability

Silicon-based microelectromechanical systems (MEMS) sensors have become ubiquitous in consumer-based products, but realization of an interconnected network of MEMS devices that allows components to be remotely monitored and controlled, a concept often described as the “Internet of Things,” will requ...

Descripción completa

Detalles Bibliográficos
Autores principales: Sim, Gi-Dong, Krogstad, Jessica A., Reddy, K. Madhav, Xie, Kelvin Y., Valentino, Gianna M., Weihs, Timothy P., Hemker, Kevin J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Association for the Advancement of Science 2017
Materias:
Research Articles
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5489264/
https://www.ncbi.nlm.nih.gov/pubmed/28782015
http://dx.doi.org/10.1126/sciadv.1700685

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5489264/
https://www.ncbi.nlm.nih.gov/pubmed/28782015
http://dx.doi.org/10.1126/sciadv.1700685

Ejemplares similares