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Nanotwinned metal MEMS films with unprecedented strength and stability

Silicon-based microelectromechanical systems (MEMS) sensors have become ubiquitous in consumer-based products, but realization of an interconnected network of MEMS devices that allows components to be remotely monitored and controlled, a concept often described as the “Internet of Things,” will requ...

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Detalles Bibliográficos
Autores principales: Sim, Gi-Dong, Krogstad, Jessica A., Reddy, K. Madhav, Xie, Kelvin Y., Valentino, Gianna M., Weihs, Timothy P., Hemker, Kevin J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Association for the Advancement of Science 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5489264/
https://www.ncbi.nlm.nih.gov/pubmed/28782015
http://dx.doi.org/10.1126/sciadv.1700685
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author Sim, Gi-Dong
Krogstad, Jessica A.
Reddy, K. Madhav
Xie, Kelvin Y.
Valentino, Gianna M.
Weihs, Timothy P.
Hemker, Kevin J.
author_facet Sim, Gi-Dong
Krogstad, Jessica A.
Reddy, K. Madhav
Xie, Kelvin Y.
Valentino, Gianna M.
Weihs, Timothy P.
Hemker, Kevin J.
author_sort Sim, Gi-Dong
collection PubMed
description Silicon-based microelectromechanical systems (MEMS) sensors have become ubiquitous in consumer-based products, but realization of an interconnected network of MEMS devices that allows components to be remotely monitored and controlled, a concept often described as the “Internet of Things,” will require a suite of MEMS materials and properties that are not currently available. We report on the synthesis of metallic nickel-molybdenum-tungsten films with direct current sputter deposition, which results in fully dense crystallographically textured films that are filled with nanotwins. These films exhibit linear elastic mechanical behavior and tensile strengths exceeding 3 GPa, which is unprecedented for materials that are compatible with wafer-level device fabrication processes. The ultrahigh strength is attributed to a combination of solid solution strengthening and the presence of dense nanotwins. These films also have excellent thermal and mechanical stability, high density, and electrical properties that are attractive for next-generation metal MEMS applications.
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spelling pubmed-54892642017-08-04 Nanotwinned metal MEMS films with unprecedented strength and stability Sim, Gi-Dong Krogstad, Jessica A. Reddy, K. Madhav Xie, Kelvin Y. Valentino, Gianna M. Weihs, Timothy P. Hemker, Kevin J. Sci Adv Research Articles Silicon-based microelectromechanical systems (MEMS) sensors have become ubiquitous in consumer-based products, but realization of an interconnected network of MEMS devices that allows components to be remotely monitored and controlled, a concept often described as the “Internet of Things,” will require a suite of MEMS materials and properties that are not currently available. We report on the synthesis of metallic nickel-molybdenum-tungsten films with direct current sputter deposition, which results in fully dense crystallographically textured films that are filled with nanotwins. These films exhibit linear elastic mechanical behavior and tensile strengths exceeding 3 GPa, which is unprecedented for materials that are compatible with wafer-level device fabrication processes. The ultrahigh strength is attributed to a combination of solid solution strengthening and the presence of dense nanotwins. These films also have excellent thermal and mechanical stability, high density, and electrical properties that are attractive for next-generation metal MEMS applications. American Association for the Advancement of Science 2017-06-28 /pmc/articles/PMC5489264/ /pubmed/28782015 http://dx.doi.org/10.1126/sciadv.1700685 Text en Copyright © 2017 The Authors, some rights reserved; exclusive licensee American Association for the Advancement of Science. No claim to original U.S. Government Works. Distributed under a Creative Commons Attribution NonCommercial License 4.0 (CC BY-NC). http://creativecommons.org/licenses/by-nc/4.0/ This is an open-access article distributed under the terms of the Creative Commons Attribution-NonCommercial license (http://creativecommons.org/licenses/by-nc/4.0/) , which permits use, distribution, and reproduction in any medium, so long as the resultant use is not for commercial advantage and provided the original work is properly cited.
spellingShingle Research Articles
Sim, Gi-Dong
Krogstad, Jessica A.
Reddy, K. Madhav
Xie, Kelvin Y.
Valentino, Gianna M.
Weihs, Timothy P.
Hemker, Kevin J.
Nanotwinned metal MEMS films with unprecedented strength and stability
title Nanotwinned metal MEMS films with unprecedented strength and stability
title_full Nanotwinned metal MEMS films with unprecedented strength and stability
title_fullStr Nanotwinned metal MEMS films with unprecedented strength and stability
title_full_unstemmed Nanotwinned metal MEMS films with unprecedented strength and stability
title_short Nanotwinned metal MEMS films with unprecedented strength and stability
title_sort nanotwinned metal mems films with unprecedented strength and stability
topic Research Articles
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5489264/
https://www.ncbi.nlm.nih.gov/pubmed/28782015
http://dx.doi.org/10.1126/sciadv.1700685
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