Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection

This paper reports on the development of an autonomous instrument based on an array of eight resonant microcantilevers for vapor detection. The fabricated sensors are label-free devices, allowing chemical and biological functionalization. In this work, sensors based on an array of silicon and synthe...

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Detalles Bibliográficos
Autores principales: Possas-Abreu, Maira, Ghassemi, Farbod, Rousseau, Lionel, Scorsone, Emmanuel, Descours, Emilie, Lissorgues, Gaelle
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5490690/
https://www.ncbi.nlm.nih.gov/pubmed/28538653
http://dx.doi.org/10.3390/s17061163

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5490690/
https://www.ncbi.nlm.nih.gov/pubmed/28538653
http://dx.doi.org/10.3390/s17061163

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