Cargando…

In-Process Atomic-Force Microscopy (AFM) Based Inspection

A new in-process atomic-force microscopy (AFM) based inspection is presented for nanolithography to compensate for any deviation such as instantaneous degradation of the lithography probe tip. Traditional method used the AFM probes for lithography work and retract to inspect the obtained feature but...

Descripción completa

Detalles Bibliográficos
Autor principal: Mekid, Samir
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5490694/
https://www.ncbi.nlm.nih.gov/pubmed/28561747
http://dx.doi.org/10.3390/s17061194