A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100(th)-order stable harmonics

For the sensitive high-resolution force- and field-sensing applications, the large-mass microelectromechanical system (MEMS) and optomechanical cavity have been proposed to realize the sub-aN/Hz(1/2) resolution levels. In view of the optomechanical cavity-based force- and field-sensors, the optomech...

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Detalles Bibliográficos
Autores principales: Huang, Yongjun, Flores, Jaime Gonzalo Flor, Cai, Ziqiang, Yu, Mingbin, Kwong, Dim-Lee, Wen, Guangjun, Churchill, Layne, Wong, Chee Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5491504/
https://www.ncbi.nlm.nih.gov/pubmed/28663563
http://dx.doi.org/10.1038/s41598-017-04882-4

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5491504/
https://www.ncbi.nlm.nih.gov/pubmed/28663563
http://dx.doi.org/10.1038/s41598-017-04882-4

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