A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100(th)-order stable harmonics

For the sensitive high-resolution force- and field-sensing applications, the large-mass microelectromechanical system (MEMS) and optomechanical cavity have been proposed to realize the sub-aN/Hz(1/2) resolution levels. In view of the optomechanical cavity-based force- and field-sensors, the optomech...

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Autores principales: Huang, Yongjun, Flores, Jaime Gonzalo Flor, Cai, Ziqiang, Yu, Mingbin, Kwong, Dim-Lee, Wen, Guangjun, Churchill, Layne, Wong, Chee Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5491504/
https://www.ncbi.nlm.nih.gov/pubmed/28663563
http://dx.doi.org/10.1038/s41598-017-04882-4
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author Huang, Yongjun
Flores, Jaime Gonzalo Flor
Cai, Ziqiang
Yu, Mingbin
Kwong, Dim-Lee
Wen, Guangjun
Churchill, Layne
Wong, Chee Wei
author_facet Huang, Yongjun
Flores, Jaime Gonzalo Flor
Cai, Ziqiang
Yu, Mingbin
Kwong, Dim-Lee
Wen, Guangjun
Churchill, Layne
Wong, Chee Wei
author_sort Huang, Yongjun
collection PubMed
description For the sensitive high-resolution force- and field-sensing applications, the large-mass microelectromechanical system (MEMS) and optomechanical cavity have been proposed to realize the sub-aN/Hz(1/2) resolution levels. In view of the optomechanical cavity-based force- and field-sensors, the optomechanical coupling is the key parameter for achieving high sensitivity and resolution. Here we demonstrate a chip-scale optomechanical cavity with large mass which operates at ≈77.7 kHz fundamental mode and intrinsically exhibiting large optomechanical coupling of 44 GHz/nm or more, for both optical resonance modes. The mechanical stiffening range of ≈58 kHz and a more than 100(th)-order harmonics are obtained, with which the free-running frequency instability is lower than 10(−6) at 100 ms integration time. Such results can be applied to further improve the sensing performance of the optomechanical inspired chip-scale sensors.
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spelling pubmed-54915042017-07-05 A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100(th)-order stable harmonics Huang, Yongjun Flores, Jaime Gonzalo Flor Cai, Ziqiang Yu, Mingbin Kwong, Dim-Lee Wen, Guangjun Churchill, Layne Wong, Chee Wei Sci Rep Article For the sensitive high-resolution force- and field-sensing applications, the large-mass microelectromechanical system (MEMS) and optomechanical cavity have been proposed to realize the sub-aN/Hz(1/2) resolution levels. In view of the optomechanical cavity-based force- and field-sensors, the optomechanical coupling is the key parameter for achieving high sensitivity and resolution. Here we demonstrate a chip-scale optomechanical cavity with large mass which operates at ≈77.7 kHz fundamental mode and intrinsically exhibiting large optomechanical coupling of 44 GHz/nm or more, for both optical resonance modes. The mechanical stiffening range of ≈58 kHz and a more than 100(th)-order harmonics are obtained, with which the free-running frequency instability is lower than 10(−6) at 100 ms integration time. Such results can be applied to further improve the sensing performance of the optomechanical inspired chip-scale sensors. Nature Publishing Group UK 2017-06-29 /pmc/articles/PMC5491504/ /pubmed/28663563 http://dx.doi.org/10.1038/s41598-017-04882-4 Text en © The Author(s) 2017 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Article
Huang, Yongjun
Flores, Jaime Gonzalo Flor
Cai, Ziqiang
Yu, Mingbin
Kwong, Dim-Lee
Wen, Guangjun
Churchill, Layne
Wong, Chee Wei
A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100(th)-order stable harmonics
title A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100(th)-order stable harmonics
title_full A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100(th)-order stable harmonics
title_fullStr A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100(th)-order stable harmonics
title_full_unstemmed A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100(th)-order stable harmonics
title_short A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100(th)-order stable harmonics
title_sort low-frequency chip-scale optomechanical oscillator with 58 khz mechanical stiffening and more than 100(th)-order stable harmonics
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5491504/
https://www.ncbi.nlm.nih.gov/pubmed/28663563
http://dx.doi.org/10.1038/s41598-017-04882-4
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