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A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100(th)-order stable harmonics
For the sensitive high-resolution force- and field-sensing applications, the large-mass microelectromechanical system (MEMS) and optomechanical cavity have been proposed to realize the sub-aN/Hz(1/2) resolution levels. In view of the optomechanical cavity-based force- and field-sensors, the optomech...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5491504/ https://www.ncbi.nlm.nih.gov/pubmed/28663563 http://dx.doi.org/10.1038/s41598-017-04882-4 |