Internal Model-Based Robust Tracking Control Design for the MEMS Electromagnetic Micromirror

The micromirror based on micro-electro-mechanical systems (MEMS) technology is widely employed in different areas, such as scanning, imaging and optical switching. This paper studies the MEMS electromagnetic micromirror for scanning or imaging application. In these application scenarios, the micromi...

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Detalles Bibliográficos
Autores principales: Tan, Jiazheng, Sun, Weijie, Yeow, John T. W.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5492107/
https://www.ncbi.nlm.nih.gov/pubmed/28587105
http://dx.doi.org/10.3390/s17061215

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5492107/
https://www.ncbi.nlm.nih.gov/pubmed/28587105
http://dx.doi.org/10.3390/s17061215

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