n(+) GaAs/AuGeNi-Au Thermocouple-Type RF MEMS Power Sensors Based on Dual Thermal Flow Paths in GaAs MMIC

To achieve radio frequency (RF) power detection, gain control, and circuit protection, this paper presents n(+) GaAs/AuGeNi-Au thermocouple-type RF microelectromechanical system (MEMS) power sensors based on dual thermal flow paths. The sensors utilize a conversion principle of RF power-heat-voltage...

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Detalles Bibliográficos
Autores principales: Zhang, Zhiqiang, Liao, Xiaoping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5492267/
https://www.ncbi.nlm.nih.gov/pubmed/28629144
http://dx.doi.org/10.3390/s17061426

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5492267/
https://www.ncbi.nlm.nih.gov/pubmed/28629144
http://dx.doi.org/10.3390/s17061426

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