Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film

A square piezoelectric composite diaphragm was analyzed by the finite element method to enhance the sensitivity of a piezoelectric micromachined ultrasound transducer (pMUT). The structures of electrode and piezoelectric film were optimized and a centric electrode was designed to avoid the counterac...

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Detalles Bibliográficos
Autores principales: Li, Junhong, Ren, Wei, Fan, Guoxiang, Wang, Chenghao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5492404/
https://www.ncbi.nlm.nih.gov/pubmed/28613242
http://dx.doi.org/10.3390/s17061381

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5492404/
https://www.ncbi.nlm.nih.gov/pubmed/28613242
http://dx.doi.org/10.3390/s17061381

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