The Influence of the Composition of Ru(100−x)Al(x) (x = 50, 55, 60, 67) Thin Films on Their Thermal Stability

RuAl thin films possess a high potential as a high temperature stable metallization for surface acoustic wave devices. During the annealing process of the Ru-Al films, Al [Formula: see text] O [Formula: see text] is formed at the surface of the films even under high vacuum conditions, so that the co...

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Detalles Bibliográficos
Autores principales: Seifert, Marietta, Rane, Gayatri K., Oswald, Steffen, Menzel, Siegfried B., Gemming, Thomas
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5503342/
https://www.ncbi.nlm.nih.gov/pubmed/28772637
http://dx.doi.org/10.3390/ma10030277

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5503342/
https://www.ncbi.nlm.nih.gov/pubmed/28772637
http://dx.doi.org/10.3390/ma10030277

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