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The Influence of the Composition of Ru(100−x)Al(x) (x = 50, 55, 60, 67) Thin Films on Their Thermal Stability
RuAl thin films possess a high potential as a high temperature stable metallization for surface acoustic wave devices. During the annealing process of the Ru-Al films, Al [Formula: see text] O [Formula: see text] is formed at the surface of the films even under high vacuum conditions, so that the co...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5503342/ https://www.ncbi.nlm.nih.gov/pubmed/28772637 http://dx.doi.org/10.3390/ma10030277 |